Propylene glycol methyl ether acetate

Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA,[3] by Shell Chemical under the name methyl proxitol acetate,[4][5] and by Eastman under the name PM Acetate.[6]

Propylene glycol methyl ether acetate
Names
Preferred IUPAC name
1-Methoxypropan-2-yl acetate
Other names
PGMEA; 1-methoxy-2-propanyl acetate; PM Acetate; Propylene glycol monomethyl ether acetate
Identifiers
3D model (JSmol)
ChemSpider
ECHA InfoCard100.003.277 Edit this at Wikidata
UNII
  • InChI=1S/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3
    Key: LLHKCFNBLRBOGN-UHFFFAOYSA-N
  • InChI=1/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3
    Key: LLHKCFNBLRBOGN-UHFFFAOYAD
  • CC(COC)OC(=O)C
Properties
C6H12O3
Molar mass132.159 g·mol−1
AppearanceColorless liquid
Density0.962 g/cm3
Melting point−67 °C (−89 °F; 206 K)
Boiling point146 °C (295 °F; 419 K)
19.8g /100mL H2O(25 °C
log P0.26[1]
Hazards
GHS labelling:
H226, H402
NFPA 704 (fire diamond)
Flash point43 °C (109 °F; 316 K)
333 °C (631 °F; 606 K)
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).

In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[7] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[8] due to its evaporation into ambient air.

References